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A part of our product line-up. We are responsible for planning, producing and installing all the way. We suggest the most suitable system construction after making and testing a trial product meeting clients' needs.
[ Large-size Multi-crystalline Silicone Production System for Solar battery ]
Multi-crystalline silicone production system Multi-crystalline silicone production system
< Incidental facilities >
Automatic weighing conveyor Burn production system Chilling unit
Automatic
weighing conveyor
Burn production system Chilling unit
Multicrystalline silicon production furnace MSF-840S Multi-crystalline silicone production system
[ Pull-up Crystal Growing System(CZ) ]
High frequency heating system Door type Resistive heating system Resistive heating system
High frequency heating system Door type Resistive heating system Resistive heating system
[ Resistive Heating Crystal Growing System ]
Bridgman crystal growth station Vertical type Bridgman crystal growth station Vacuum type Bridgman crystal growth station Horizontal type Pull-down device Pull-down device
Bridgman crystal growth station Vertical type Bridgman crystal growth station Vacuum type Bridgman crystal growth station Horizontal type Pull-down device Pull-down device
[ Induction heating furnace ] [ Resistive heating furnace ] [ High vacuum heating system ]
Super high temperature General heating system High vacuum heating system Induction heating furnace
Super high temperature General heating system High vacuum heating system Induction heating furnace
[ Vapor phase growth system ] [ Liquid phase epitaxial growth system ]
CVD system for SiC CVD system for SiC LPE LPE
[ Heat-treating applications ]
General heating system General
heating
system
Automatic annealing conveyance system Automatic
annealing
conveyance
system
Cable heating system Cable
heating
system
[ Induction heating equipment ]
ADC functions The TR series invertor MOS invertor General heating system  Coolant circulation system
ADC functions The TR series invertor MOS invertor General heating system Coolant circulation system
[ Bulk Cultivatable Sublimation Furnace ] [ Rapid Heating & Cooling System (RTA) ]
Bulk Cultivatable Sublimation Furnace Bulk
Cultivatable
Sublimation
Furnace
Rapid Heating & Cooling System (RTA) Rapid Heating &
Cooling System
(RTA)
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