{"id":1806,"date":"2026-04-15T12:57:11","date_gmt":"2026-04-15T03:57:11","guid":{"rendered":"https:\/\/www.d-kdn.co.jp\/?post_type=products&#038;p=1806"},"modified":"2026-04-15T14:19:36","modified_gmt":"2026-04-15T05:19:36","slug":"%e3%83%ad%e3%83%bc%e3%83%89%e3%83%ad%e3%83%83%e3%82%af%e5%bc%8fcvd%e8%a3%85%e7%bd%ae","status":"publish","type":"products","link":"https:\/\/www.d-kdn.co.jp\/en\/products\/kougyouro\/1806\/","title":{"rendered":"Load lock type CVD apparatus"},"content":{"rendered":"\n<div class=\"wp-block-buttons is-content-justification-center is-layout-flex wp-container-core-buttons-is-layout-16018d1d wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-50 is-style-fill\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/www.d-kdn.co.jp\/en\/contact\/\">Contact us<\/a><\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Description<\/h2>\n\n\n\n<p>Hybrid heating type of high-frequency induction heating to heat the wafers, and heater for heating the raw materials.<\/p>\n\n\n\n<p>It can process a maximum of 16 wafers. before-processed wafers are taken out from the wafer stocker, transported, heat-treated, and returned to the wafer stocker by fully automatic process.<\/p>\n\n\n\n<p>When exchanging wafers after heat treatment, the temperature is lowered once, but by high-frequency induction heating, the temperature can be raised again very rapidly, this shorten the running time for 1 batch.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Feature<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Wafers can be heat-treated continuously<\/li>\n\n\n\n<li>Maximum number of process is 16 sheets<\/li>\n\n\n\n<li>Fully automated from transfer to heat treatment of wafer<\/li>\n\n\n\n<li>Hybrid heating (high frequency induction heating + heater heating)<\/li>\n\n\n\n<li>Space&amp;energy-saving design<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Specification<\/h2>\n\n\n\n<figure class=\"wp-block-flexible-table-block-table\"><table class=\"\" style=\"max-width:none\"><tbody><tr><th>Heating method<\/th><td>High frequency induction heating + heater heating<br> (3 zones)<\/td><\/tr><tr><th><strong>Heating temperature<\/strong><\/th><td>1200\u2103<\/td><\/tr><tr><th><strong>Atmosphere<\/strong><\/th><td>Inert gas atmosphere after vacuum<\/td><\/tr><tr><th><strong>Wafer size<\/strong><\/th><td>6 inches<\/td><\/tr><tr><th><strong>Number of processing sheets<\/strong><\/th><td>16 sheets<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-buttons is-content-justification-center is-layout-flex wp-container-core-buttons-is-layout-16018d1d wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-50 is-style-fill\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/www.d-kdn.co.jp\/en\/contact\/\">Contact us<\/a><\/div>\n<\/div>\n","protected":false},"featured_media":1007,"template":"","products-cat":[3],"products-application":[16],"products-field":[24],"products-tag":[116,117,97,101,109],"class_list":["post-1806","products","type-products","status-publish","has-post-thumbnail","hentry","products-cat-kougyouro","products-application-heat-treatment","products-field-semiconductors","products-tag-116","products-tag-117","products-tag-97","products-tag-101","products-tag-109","en-US"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products\/1806","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products"}],"about":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/types\/products"}],"version-history":[{"count":4,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products\/1806\/revisions"}],"predecessor-version":[{"id":1896,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products\/1806\/revisions\/1896"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/media\/1007"}],"wp:attachment":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/media?parent=1806"}],"wp:term":[{"taxonomy":"products-cat","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-cat?post=1806"},{"taxonomy":"products-application","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-application?post=1806"},{"taxonomy":"products-field","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-field?post=1806"},{"taxonomy":"products-tag","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-tag?post=1806"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}