{"id":1918,"date":"2026-04-15T16:33:09","date_gmt":"2026-04-15T07:33:09","guid":{"rendered":"https:\/\/www.d-kdn.co.jp\/?post_type=products&#038;p=1918"},"modified":"2026-04-15T16:33:10","modified_gmt":"2026-04-15T07:33:10","slug":"%e9%ab%98%e6%b8%a9%e6%80%a5%e5%86%b7%e3%82%a2%e3%83%8b%e3%83%bc%e3%83%ab%e8%a3%85%e7%bd%ae%ef%bc%88rta%e7%82%89%ef%bc%89","status":"publish","type":"products","link":"https:\/\/www.d-kdn.co.jp\/en\/products\/ikusei\/1918\/","title":{"rendered":"Rapid thermal annealing apparatus (RTA furnace)"},"content":{"rendered":"\n<div class=\"wp-block-buttons is-content-justification-center is-layout-flex wp-container-core-buttons-is-layout-16018d1d wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-50 is-style-fill\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/www.d-kdn.co.jp\/en\/contact\/\">Contact us<\/a><\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Description<\/h2>\n\n\n\n<p>RSA is a heat treatment apparatus for activation after ion implantation to SiC wafers. with shuttle system, it was to enable to rapid temperature increase and decrease, high-speed quenching.<br>Mass production type is also available that is capable of a large number of sheets simultaneous processing by overlaying the wafer stage.<\/p>\n\n\n\n<p><a href=\"http:\/\/iontc.co.jp\/en\/semiconductor_process\/\">Ion Technology Center Co.,Ltd<\/a>&nbsp;get use of this apparatus to do an accession activation annealing treatment in consignment.<\/p>\n\n\n\n<p>\u203bA large number of sheets simultaneous processing by the adoption of new technology&nbsp; is now possible (when 4 inch wafer).<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Feature<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>As it uses the rapid heating cooling function, throughput is fast even it does the sheet treatment<\/li>\n\n\n\n<li>Since the\u00a0reactor\u00a0and the cooling chamber\u00a0is divided,\u00a0possible\u00a0to maintain a\u00a0high temperature\u00a0and uniform\u00a0heating\u00a0unit<\/li>\n\n\n\n<li>The high temperature\u00a0heating part reduce\u00a0running\u00a0cost<\/li>\n\n\n\n<li>High vacuum\u00a0compatible(Dry\u00a0pump\u00a0+\u00a0turbo\u00a0molecular pump\u00a0available)<\/li>\n\n\n\n<li>Up to\u00a02,000 \u2103<\/li>\n\n\n\n<li>Realized temperature\u00a0distribution\u00a0of the\u00a0\u00b110 \u2103\u00a0and\u00a0less\u00a0(1,500\u2103, when 4 inch treatment)<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Specification<\/h2>\n\n\n\n<figure class=\"wp-block-flexible-table-block-table is-style-default\"><table class=\"has-fixed-layout\"><tbody><tr><th style=\"text-align:center;width:34.8%\"><strong>Processing\u00a0possible\u00a0dimensions<\/strong><\/th><td>4\uff5e6 inch wafer<\/td><\/tr><tr><th style=\"text-align:center;width:34.8%\"><strong>Heating temperature<\/strong><\/th><td>1900\u2103\uff08Max. 2000\u2103 at heater section\uff09<\/td><\/tr><tr><th style=\"text-align:center;width:34.8%\"><strong>Processing time<\/strong><\/th><td>20min\/sheet<\/td><\/tr><tr><th style=\"text-align:center;width:34.8%\"><strong>Degree of vacuum<\/strong><\/th><td>10 Pa, (10-3 Pa for optional specifications)<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-buttons is-content-justification-center is-layout-flex wp-container-core-buttons-is-layout-16018d1d wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-50 is-style-fill\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/www.d-kdn.co.jp\/en\/contact\/\">Contact us<\/a><\/div>\n<\/div>\n\n\n\n<p><\/p>\n","protected":false},"featured_media":1180,"template":"","products-cat":[4],"products-application":[16],"products-field":[24,30],"products-tag":[120,130],"class_list":["post-1918","products","type-products","status-publish","has-post-thumbnail","hentry","products-cat-ikusei","products-application-heat-treatment","products-field-semiconductors","products-field-optics-and-photonics","products-tag-ikusei","products-tag-rta","en-US"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products\/1918","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products"}],"about":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/types\/products"}],"version-history":[{"count":1,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products\/1918\/revisions"}],"predecessor-version":[{"id":1919,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products\/1918\/revisions\/1919"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/media\/1180"}],"wp:attachment":[{"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/media?parent=1918"}],"wp:term":[{"taxonomy":"products-cat","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-cat?post=1918"},{"taxonomy":"products-application","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-application?post=1918"},{"taxonomy":"products-field","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-field?post=1918"},{"taxonomy":"products-tag","embeddable":true,"href":"https:\/\/www.d-kdn.co.jp\/wp-json\/wp\/v2\/products-tag?post=1918"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}