Liquid phase epitaxial system (LPE method)
Easy soaking with double shutter
Compound single crystal growth apparatus
LPE apparatus (Liquid Phase Epitaxial) is a device that grows a thin film crystal in the liquid phase.
It is possible to obtain an optimum temperature distribution with a 3-zone heater.
- Shutter has become easier to take is soaking has become a double
- Exhaust available from the top
- High-precision substrate lifting, rotary drive mechanism
|Heating method||Resistance heating system, 3-zone|
|Heater||KANTHAL SUPER, Various metal heating element（Mo, W, Ni, Cr）|
|Flat zone length||
150mm±1℃（When empty inside）
High 5～200mm/min, low 0.5～20mm/h
| Crystal growth |