MSF-690C / MSF-840C

Multicrystalline silicon production furnace

Fully controlled by PC

Screen configuration

Compact furnace (patent pending)

Low running costs,
excellent safety controls

Description

Dai-ichi Kiden leading-edge technology brings economical feature to silicon production

Multicrystalline silicon production systems for producing crystals for solar cells.

Feature

  • Fully controlled, screen configuration by PC (5 different interfaces)
  • Compact furnace (patent pending)
  • Low running cost
  • Features excellent safety

Specification

Maximum charging size of the silicon840×840×250(mm)
Growing time60~70h
Boule weight420kg
Heating temperatureMax 1700℃、operating temp.1600℃ (carbon heater)
Furnace pressureAir~depressurization
AtmosphereAr gas 1~50L/min、Pressure 0.2Mpa 50L/min
Power supply3-phase AC、400/440V、50/60HZ Common use、300KVA
RefractoryMolding insulation material (carbon material)
Cooling waterPressure 0.3MPa、flow rate 400L/min、temperature 35℃ or less
Air0.5MPa or more
ChamberWater-cooled double structure