Ultra-high-quality large ingot growth system
to grow High-Quality and Large Si crystal
This new system incorporates the benefits of cast growth method, the Czochralski(CZ) method, Kyropoulos methodto have a function for the growth of the high-quality silicon crystal. The low-temperature region is formed in the silicon melt upper, growing ingot by pulling up the silicon crystal continuously using a seed crystal.
※ This document was allowed to be diverted from JST FUTURE-PV Innovation project material.
- Furnace structure reduces the particles of carbon hot zone
- Energy saving structure reduces running cost
- Could be operated from a separate room by remote control function
- Easy seeding mechanism
|Crystal size||Max. φ500×H400（mm）|
|Crystal weight||Max. 100kg|
|Heating method||Resistance heating method with 2 zone carbon heater|
Max. 1600℃、operationg temp. 1550℃
|Atmosphere||Atmospheric pressure with an inert gas or reduced-pressure atmosphere|
|Take-out of chamber||Lower part take-out mechanism by elevating the chamber bottom|
| Crystal growth |