Liquid phase epitaxial system (LPE method)|Dai-ichi kiden, expert of high-frequency induction heating and hot press, induction heating apparatus

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Product

Liquid phase epitaxial system (LPE method)

Easy soaking with double shutter

 

 

Compound single crystal growth apparatus

Description

LPE apparatus (Liquid Phase Epitaxial) is a device that grows a thin film crystal in the liquid phase.
It is possible to obtain an optimum temperature distribution with a 3-zone heater.

Feature

  • Shutter has become easier to take is soaking has become a double
  • Exhaust available from the top
  • High-precision substrate lifting, rotary drive mechanism

Specification

Heating method Resistance heating system, 3-zone
Heater KANTHAL SUPER, Various metal heating element(Mo, W, Ni, Cr)
Heating temperature

800~1300℃

Flat zone length

150mm±1℃(When empty inside)

Elevating speed

High 5~200mm/min, low 0.5~20mm/h

Rotation speed

1~30rpm/min(CW, CCW)

|   Crystal growth   |

Contact

Please feel free to contact us if you have any questions.

042-488-3312

Reception time 09:00~17:30

Contact us by e-mail

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